JPS5969141A - 外熱形プラズマ化学気相生成装置の電極保持装置 - Google Patents

外熱形プラズマ化学気相生成装置の電極保持装置

Info

Publication number
JPS5969141A
JPS5969141A JP57178763A JP17876382A JPS5969141A JP S5969141 A JPS5969141 A JP S5969141A JP 57178763 A JP57178763 A JP 57178763A JP 17876382 A JP17876382 A JP 17876382A JP S5969141 A JPS5969141 A JP S5969141A
Authority
JP
Japan
Prior art keywords
bars
electrode
electrodes
electrode holding
rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57178763A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153428B2 (en]
Inventor
Hironobu Miya
博信 宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP57178763A priority Critical patent/JPS5969141A/ja
Publication of JPS5969141A publication Critical patent/JPS5969141A/ja
Publication of JPS6153428B2 publication Critical patent/JPS6153428B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP57178763A 1982-10-12 1982-10-12 外熱形プラズマ化学気相生成装置の電極保持装置 Granted JPS5969141A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57178763A JPS5969141A (ja) 1982-10-12 1982-10-12 外熱形プラズマ化学気相生成装置の電極保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57178763A JPS5969141A (ja) 1982-10-12 1982-10-12 外熱形プラズマ化学気相生成装置の電極保持装置

Publications (2)

Publication Number Publication Date
JPS5969141A true JPS5969141A (ja) 1984-04-19
JPS6153428B2 JPS6153428B2 (en]) 1986-11-18

Family

ID=16054177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57178763A Granted JPS5969141A (ja) 1982-10-12 1982-10-12 外熱形プラズマ化学気相生成装置の電極保持装置

Country Status (1)

Country Link
JP (1) JPS5969141A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6299476A (ja) * 1985-10-28 1987-05-08 Agency Of Ind Science & Technol プラズマｃｖｄ装置の放電電極

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6227928U (en]) * 1985-08-01 1987-02-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6299476A (ja) * 1985-10-28 1987-05-08 Agency Of Ind Science & Technol プラズマｃｖｄ装置の放電電極

Also Published As

Publication number Publication date
JPS6153428B2 (en]) 1986-11-18

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